The nucleation and growth of large area, highly oriented diamond films on silicon substrates

Diamond and Related Materials

Volumn 7, Issue 2-5, 1998, Pages 283-288

  Floter A ^a   Guttler H ^a   Schulz, G ^a   Steinbach, D ^a   Lutz Elsner, C ^a   Zachai, R ^a   Bergmaier, A ^b   Dollinger, G ^b  

^a DAIMLER AG   (Germany)

^b TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

Bias enhanced nucleation; Diamond films; Nucleation; Silicon

Indexed keywords

CHEMICAL VAPOR DEPOSITION; GROWTH (MATERIALS); NUCLEATION; PLASMAS; SILICON; SUBSTRATES;

BIAS ENHANCED NUCLEATION;

DIAMOND FILMS;

EID: 0031996198     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(97)00245-8     Document Type: Article

References (18)

1. S. Yugo, T. Kanai, T. Kimura, T. Muto, Appl. Phys. Lett. 58 (1991) 1036.
2. X. Jiang, C.-P. Klages, R. Zachai, M. Hartweg, H.-J. Uüsser, Appl. Phys. Lett. 62 (26) (1993) 3438.
3. B.R. Stoner, G.H. Ma, S.D. Wolter, W. Zhu, Y.-C. Wang, R.F. Davis, J.T. Glass, Diamond Relat. Mater. 2 (1993) 142.
4. T. Suesada, N. Nakamura, H. Nagasawa, H. Kawarada, Jpn. J. Appl. Phys. 34 (1995) 4898.
5. M.G. Jubber, D.K. Milne, Phys. Status Solidi A 154 (1) (1996) 185.
6. R.D. marshall, M.D. Whitfield, D. Michael, R.B. Jackman, Diamond Relat. Mater. 6 (5-7) (1997) 676.
7. X. Jiang, M. Paul, C.-P. Klages, Diamond Relat. Mater. 5 (1996) 251.
8. N. Marechal, S. Yamashita, Thin Solid Films 290291 (1996) 131.
9. A. Flöter, H. Güttler, G. Schulz, R. Zachai, Proceedings of the NIRM International Symposium on Advanced Materials, 1998.
10. C. Wild, P. Koidl, W. Müller-Sebert, H. Walcher, R. Kohl, N. Herres, R. Locher, R. Samlenski, R. Brenn, Diamond Relat. Mater. 2 (1993) 158.
11. G. Dollinger, T. Faestermann, P. Maier-Komor, Nucl. Instrum. Meth. B 64 (1992) 422.
12. R. Hessmer, M. Schreck, B. Stritzker, Diamond Relat. Mater. 4 (1995) 416.
13. R. Hessmer, M. Schreck, S. Geier, B. Rauschenbach, B. Stritzker, Diamond Relat. Mater. 4 (4) (1994) 410.
14. H. Windischmann, K.J. Gray, Diamond Relat. Mater. 4 (1995) 837.
15. A. Flöter, H. Güttler, C. Lutz-Elsner, R. Zachai, A. Bergmaier, G. Dollinger, J. Appl. Phys. (in press).
16. P.K. Bachmann, H.J. Hagemann, H. Lade, D. Leers, D.U. Wiechert, H. Wilson, D. Fournier, K. Plamann, Diamond Relat. Mater. 4 (1995) 820.
17. J. Wilks, E. Wilks, Properties and Applications of Diamond, Butterworth-Heinemann, Oxford, 1991, p. 67.
18. A.T. Collins, Semicond. Sci. Technol. 4 (1989) 605.