Mechanical characterization and stress engineering of nanocrystalline diamonds films for MEMS applications

Diamond and Related Materials

Volumn 14, Issue 3-7, 2005, Pages 411-415

  Guillén, F J Hernández ^a   Janischowsky, Klemens ^a   Kusterer, Joachim ^a   Ebert, Wolfgang ^a   Kohn, Erhard ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

Diamond film; MEMS; Nanocrystalline; Stress

Indexed keywords

COMPRESSIVE STRENGTH; ELASTIC MODULI; FILM GROWTH; NANOSTRUCTURED MATERIALS; REDUCTION; STRESSES; SUBSTRATES;

BISTABLE MEMBRANES; MEMS; RENUCLEATION; SUBSTRATE TEMPERATURE;

DIAMOND FILMS;

EID: 18444393084     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.12.061     Document Type: Conference Paper

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