SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 290-291, Issue , 1996, Pages 254-259

Origins of the residual stress in cvd diamond films

(3) Kuo, Cheng Tzu a Lin, Chii Ruey a Lien, How Min a

a NATIONAL CHIAO TUNG UNIVERSITY (Taiwan)

Author keywords

Diamond film; Interface structure; Residual stress

Indexed keywords

ADHESION; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; CRYSTAL STRUCTURE; INTERFACES (MATERIALS); RAMAN SPECTROSCOPY; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; TEXTURES; THERMAL STRESS; X RAY CRYSTALLOGRAPHY;

INDENTATION ADHESION TESTING; INTRINSIC STRESS; MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION;

DIAMOND FILMS;

EID: 0030396045 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(96)09016-5 Document Type: Article

Times cited : (104)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.