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Volumn 90, Issue 13, 2007, Pages

Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems

Author keywords

[No Author keywords available]

Indexed keywords

HIGH PERFORMANCE MEMS; LOW ELECTRICAL NOISE; TRIBOLOGICAL PROPERTIES; ULTRANANOCRYSTALLINE DIAMONDS;

DIAMOND FILMS; NANOCRYSTALLINE MATERIALS; NEMS; PIEZOELECTRIC DEVICES; SENSITIVITY ANALYSIS; SILICON;

HETEROJUNCTIONS;

EID: 34047127366 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2679209 Document Type: Article

Times cited : (74)

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