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Volumn 49, Issue 7, 2005, Pages 1055-1070
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Diamond semiconductor technology for RF device applications
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Author keywords
Chemical vapour deposition (CVD); Diamond; RF device
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Indexed keywords
ACOUSTIC WAVES;
CHEMICAL VAPOR DEPOSITION;
ELECTRONIC PROPERTIES;
FIELD EFFECT TRANSISTORS;
MICROELECTROMECHANICAL DEVICES;
SEMICONDUCTING DIAMONDS;
SURFACE WAVES;
DIAMOND ELECTRONICS;
FIEL EMISSION (FE);
RF DEVICES;
SURFACE ACOUSTIC WAVES (SAW);
SEMICONDUCTOR DEVICE MANUFACTURE;
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EID: 21444431644
PISSN: 00381101
EISSN: None
Source Type: Journal
DOI: 10.1016/j.sse.2005.04.005 Document Type: Review |
Times cited : (78)
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References (87)
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