Diamond microstructures for optical micro electromechanical systems

Sensors and Actuators, A: Physical

Volumn 78, Issue 1, 1999, Pages 41-47

  Bjorkman H ^a   Rangsten, P ^a   Hjort, K ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL MICROSTRUCTURE; DIAMONDS; DIFFRACTIVE OPTICS; OPTICAL DEVICES; OPTICAL FIBERS; POLYCRYSTALLINE MATERIALS; POWER ELECTRONICS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

HOT FILAMENT CHEMICAL VAPOR DEPOSITION (HFCVD); OPTICAL MICROELECTROMECHANICAL SYSTEMS (MEMS);

MICROELECTROMECHANICAL DEVICES;

EID: 0343026387     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00202-2     Document Type: Article

References (18)

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