Diamond technology for electronics and MEMS: Review of status and perspectives

2002 23rd International Conference on Microelectronics, MIEL 2002 - Proceedings

Volumn 1, Issue , 2002, Pages 59-66

  Kohn, E ^a   Ebert, W ^a   Aleksov, A ^a   Denisenko, A ^a   Adamschik, M ^a   Schmid, P ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MATERIALS PROPERTIES; MECHANICAL PROPERTIES; MICROELECTRONICS;

BUILDING BLOCKES; DEVICE CHARACTERISTICS; DIAMOND MATERIALS; ELECTRONIC COMPONENT; HIGH-TEMPERATURE ELECTRONICS; MICROSWITCHES; RECENT PROGRESS; WIDE-BAND-GAP SEMICONDUCTOR;

DIAMONDS;

EID: 71849098834     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MIEL.2002.1003149     Document Type: Conference Paper

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