Review: Semiconductor piezoresistance for microsystems

Proceedings of the IEEE

Volumn 97, Issue 3, 2009, Pages 513-552

  Barlian, A Alvin ^a   Park, Woo Tae ^a   Mallon Jr , Joseph R ^a   Rastegar, Ali J ^a   Pruitt, Beth L ^a  

^a Stanford University   (United States)

Author keywords

MEMS; Microfabrication; Micromachining; Microsensors; Piezoresistance; Piezoresistor; Sensors

Indexed keywords

ELECTROMECHANICAL DEVICES; MEMS; MICROFABRICATION; MICROMACHINING; MICROSENSORS; SENSORS;

ALTERNATIVE MATERIALS; DESIGN CONSIDERATIONS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICROMACHINING TECHNOLOGIES; PIEZO-RESISTIVE SENSORS; PIEZORESISTANCE; PIEZORESISTOR; PROCESS AND MATERIAL SELECTION;

MICROSYSTEMS;

EID: 64149103117     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/JPROC.2009.2013612     Document Type: Review

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