Spin on dopants for high-performance single-crystal silicon transistors on flexible plastic substrates

Applied Physics Letters

Volumn 86, Issue 13, 2005, Pages 1-3

  Zhu, Z T ^a   Menard, E ^a   Hurley, K ^a   Nuzzo, R G ^a   Rogers, J A ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

LOW TEMPERATURE EFFECTS; MICROSTRUCTURE; RAPID THERMAL ANNEALING; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; SINGLE CRYSTALS;

DOPANTS; SILICON TRANSISTORS; SPIN-ON GLASS (SOG); SPIN-ON-DOPANT (SOD);

THIN FILM TRANSISTORS;

EID: 17644384476     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1894611     Document Type: Article

References (13)

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