Independent detection of vertical and lateral forces with a sidewall-implanted dual-axis piezoresistive cantilever

Applied Physics Letters

Volumn 72, Issue 11, 1998, Pages 1388-1390

  Chui, B W ^a   Kenny, T W ^a   Mamin, H J ^b   Terris, B D ^b   Rugar, D ^b  

^a STANFORD UNIVERSITY   (United States)

^b IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000734413     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121064     Document Type: Article

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