On-chip circuitry for a CMOS parallel scanning AFM

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3673, Issue , 1999, Pages 240-248

  Hagleitner, C ^a   Lange, D ^a   Akiyama, T ^a   Tonin, A ^a   Vogt, R ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; AMPLIFIERS (ELECTRONIC); CMOS INTEGRATED CIRCUITS; MICROMACHINING; MICROPROCESSOR CHIPS; OPTICAL SENSORS;

ATOMIC FORCE MICROSCOPE; LOW NOISE AMPLIFIER; ON CHIP COMPENSATION; SIGNAL CONDITIONING CIRCUITRY;

ATOMIC FORCE MICROSCOPY;

EID: 0033336918     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)