Nanochemical surface analyzer in CMOS technology

Ultramicroscopy

Volumn 91, Issue 1-4, 2002, Pages 21-27

  Franks, W ^a   Lange, D ^a   Lee, S ^a   Hierlemann, A ^a   Spencer, N ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

AFM; Chemical force microscopy; Chemically modified AFM tips; Self sensing AFM cantilevers

Indexed keywords

ACTUATORS; CHEMICAL ANALYSIS; CMOS INTEGRATED CIRCUITS; HYDROPHILICITY; HYDROPHOBICITY; SENSORS;

NANOCHEMICAL SURFACE ANALYZERS;

ATOMIC FORCE MICROSCOPY;

GLASS; MICROSPHERE;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMICAL ANALYSIS; CHEMICAL MODIFICATION; HYDROPHILICITY; HYDROPHOBICITY; LASER; SAMPLING; STANDARD; SURFACE PROPERTY; TECHNOLOGY;

EID: 0036329482     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(02)00078-5     Document Type: Article

References (28)

1. Parallel scanning AFM with on-chip circuitry in CMOS technology
2. CMOS 10-cantilever array for constant-force parallel scanning AFM