Integrated sensors, MEMS, and microsystems: Reflections on a fantastic voyage

Sensors and Actuators, A: Physical

Volumn 136, Issue 1, 2007, Pages 39-50

  Wise, Kensall D ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Gas chromatography; MEMS history; Microsystems; Neural probes; Pressure sensors

Indexed keywords

ACTUATORS; ELECTRODES; GAS CHROMATOGRAPHY; MEMS; MICROSYSTEMS; NEUROLOGY; PRESSURE SENSORS; SIGNAL PROCESSING;

MEMS HISTORY; MICROMACHINED SILICON DEVICES; NEURAL PROBES; PRECISION MAPPING;

MICROSENSORS;

EID: 34247145825     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.02.013     Document Type: Review

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