History of industrial and commercial ion implantation 1906-1978

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 4 II, 2000, Pages 1746-1750

  Yarling, C B ^a  

^a EEESPEC/Ion Beam Press   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HISTORY; INTEGRATED CIRCUIT MANUFACTURE; SEMICONDUCTOR DEVICE MANUFACTURE;

ION IMPLANTERS;

ION IMPLANTATION;

EID: 0034228716     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582417     Document Type: Article

References (23)

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