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Applied Physics Letters

Volumn 75, Issue 2, 1999, Pages 289-291

High-sensitivity piezoresistive cantilevers under 1000 Å thick

(2) Harley, J A a Kenny, T W a

a Stanford University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041705468 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.124350 Document Type: Article

Times cited : (178)

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