5×5 2D AFM cantilever arrays a first step towards a Terabit storage device

Sensors and Actuators, A: Physical

Volumn 73, Issue 1-2, 1999, Pages 89-94

  Lutwyche, M ^a   Andreoli, C ^a   Binnig, G ^a   Brugger, J ^a   Drechsler, U ^a   Haberle W ^a   Rohrer, H ^a   Rothuizen, H ^a   Vettiger, P ^a   Yaralioglu, G ^b   Quate, C ^b  

^a IBM RESEARCH ZURICH   (Switzerland)

^b STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DATA STORAGE EQUIPMENT; PARALLEL PROCESSING SYSTEMS; SCANNING; SENSORS; VLSI CIRCUITS;

CANTILEVER ARRAYS; MICROFABRICATION;

ATOMIC FORCE MICROSCOPY;

EID: 0033537520     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00259-3     Document Type: Article

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