메뉴 건너뛰기




Volumn 87, Issue 6, 1999, Pages 1014-1027

High-density data storage based on the atomic force microscope

Author keywords

[No Author keywords available]

Indexed keywords

DATA STORAGE EQUIPMENT; DENSITY (OPTICAL); MAGNETIC DISK STORAGE; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PIEZOELECTRIC DEVICES;

EID: 0032670557     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/5.763314     Document Type: Article
Times cited : (56)

References (47)
  • 1
    • 0030149018 scopus 로고    scopus 로고
    • Future trends in hard disk drives
    • May
    • E. Grochowski and R. F. Hoyt, "Future trends in hard disk drives," IEEE Trans. Magn., vol. 32, pp. 1850-1854, May 1996.
    • (1996) IEEE Trans. Magn. , vol.32 , pp. 1850-1854
    • Grochowski, E.1    Hoyt, R.F.2
  • 3
    • 19044362545 scopus 로고
    • 7×7 reconstruction on Si(111) resolved in real space
    • Jan.
    • G. Binnig, H. Rohrer, C. Gerber, and E. Weibel, "7×7 reconstruction on Si(111) resolved in real space," Phys. Rev. Lett., vol. 50, no. 2, pp. 120-123, Jan. 1983.
    • (1983) Phys. Rev. Lett. , vol.50 , Issue.2 , pp. 120-123
    • Binnig, G.1    Rohrer, H.2    Gerber, C.3    Weibel, E.4
  • 5
    • 0012618901 scopus 로고
    • Atomic force microscope
    • Mar.
    • G. Binnig, C. F. Quate, and C. Gerber, "Atomic force microscope," Phys. Rev. Lett., vol. 56, no. 9, pp. 930-933, Mar. 1986.
    • (1986) Phys. Rev. Lett. , vol.56 , Issue.9 , pp. 930-933
    • Binnig, G.1    Quate, C.F.2    Gerber, C.3
  • 6
    • 0342676983 scopus 로고
    • Surface modification with a scanning proximity probe microscope
    • R. Wiesendanger and H.-J. Guntherodt, Eds. Berlin, Germany: Springer
    • U. Staufer, "Surface modification with a scanning proximity probe microscope," in Scanning Tunneling Microscopy II, 2nd ed., R. Wiesendanger and H.-J. Guntherodt, Eds. Berlin, Germany: Springer, 1995, pp. 273-302.
    • (1995) Scanning Tunneling Microscopy II, 2nd Ed. , pp. 273-302
    • Staufer, U.1
  • 7
    • 0343701738 scopus 로고
    • Manipulation and modification of nanometer scale objects with the STM
    • L. Esaki, Ed. New York: Plenum
    • C. F. Quate, "Manipulation and modification of nanometer scale objects with the STM," in Highlights in Condensed Matter Physics and Future Prospects, L. Esaki, Ed. New York: Plenum, 1991, pp. 573-630.
    • (1991) Highlights in Condensed Matter Physics and Future Prospects , pp. 573-630
    • Quate, C.F.1
  • 8
    • 0012064449 scopus 로고
    • Positioning single atoms with a scanning tunnellina microscope
    • Apr.
    • D. M. Eigler and E. K. Schweizer, "Positioning single atoms with a scanning tunnellina microscope," Nature, vol. 344, no. 6266, pp. 524-526, Apr. 1990.
    • (1990) Nature , vol.344 , Issue.6266 , pp. 524-526
    • Eigler, D.M.1    Schweizer, E.K.2
  • 9
    • 36449004683 scopus 로고
    • High speed scanning tunneling microscopy: Principles and applications
    • Jan.
    • H. J. Mamin, H. Dirk, P. Wimmer, and D. Rugar, "High speed scanning tunneling microscopy: Principles and applications," J. Appl. Phys., vol. 75, no. 1, pp. 161-168, Jan. 1994.
    • (1994) J. Appl. Phys. , vol.75 , Issue.1 , pp. 161-168
    • Mamin, H.J.1    Dirk, H.2    Wimmer, P.3    Rugar, D.4
  • 10
    • 0001261014 scopus 로고    scopus 로고
    • Inequivalent atoms and imaging mechanisms in ac-mode atomic force microscopy of Si(111) 7×7
    • Sept.
    • R. Erlandsson, L. Olsson, and P. Mårtensson, "Inequivalent atoms and imaging mechanisms in ac-mode atomic force microscopy of Si(111) 7×7," Phys. Rev. B, vol. 54, no. 12, pp. R8309-8312, Sept. 1996.
    • (1996) Phys. Rev. B , vol.54 , Issue.12
    • Erlandsson, R.1    Olsson, L.2    Mårtensson, P.3
  • 11
    • 36449009560 scopus 로고
    • R. Barrett and C. F. Quate, "Charge storage in nitride-oxide-silicon medium by scanning capacitance microscopy," J. Appl. Phys., vol. 70, no. 5, pp. 2725-2733, Sept. 1991.
    • (1991) J. Appl. Phys. , vol.70 , Issue.5 , pp. 2725-2733
    • Barrett, R.1    Quate, C.F.2
  • 12
    • 0016972933 scopus 로고
    • Nonvolatile semiconductor memory devices
    • July
    • J. J. Chang, "Nonvolatile semiconductor memory devices," Proc. IEEE, vol. 64, pp. 1039-1059, July 1976.
    • (1976) Proc. IEEE , vol.64 , pp. 1039-1059
    • Chang, J.J.1
  • 13
    • 0029305424 scopus 로고
    • Data storage in NOS: Life-time and carrier-to-noise measurements
    • May
    • B. D. Terris and R. C. Barrett, "Data storage in NOS: Life-time and carrier-to-noise measurements," IEEE Trans. Electron Devices, vol. 42, pp. 944-949, May 1995.
    • (1995) IEEE Trans. Electron Devices , vol.42 , pp. 944-949
    • Terris, B.D.1    Barrett, R.C.2
  • 15
    • 36449009597 scopus 로고
    • Nanometer-scale recording on chalcogenide films with an atomic force microscope
    • May
    • H. Kado and T. Tohda, "Nanometer-scale recording on chalcogenide films with an atomic force microscope," Appl. Phys. Lett., vol. 66, no. 22, pp. 2961-2962, May 1995.
    • (1995) Appl. Phys. Lett. , vol.66 , Issue.22 , pp. 2961-2962
    • Kado, H.1    Tohda, T.2
  • 16
    • 0005158609 scopus 로고
    • Rapid-phase transitions of GeTe-SB2TE3 pseudobinary amorphous thin films for an optical disk memory
    • Mar.
    • N. Yamada, E. Ohno, K. Nishiuchi, N. Akahira, and M. Takao, "Rapid-phase transitions of GeTe-SB2TE3 pseudobinary amorphous thin films for an optical disk memory," J. Appl. Phys., vol. 69, no. 5, pp. 2849-2861, Mar. 1991.
    • (1991) J. Appl. Phys. , vol.69 , Issue.5 , pp. 2849-2861
    • Yamada, N.1    Ohno, E.2    Nishiuchi, K.3    Akahira, N.4    Takao, M.5
  • 17
    • 0029307246 scopus 로고
    • Development of highly conductive cantilevers for atomic force microscopy point contact measurements
    • May/June
    • R. E. Thomson and J. Moreland, "Development of highly conductive cantilevers for atomic force microscopy point contact measurements," J. Vac. Sci. Technol. B, vol. 13, no. 3, pp. 1123-1125, May/June 1995.
    • (1995) J. Vac. Sci. Technol. B , vol.13 , Issue.3 , pp. 1123-1125
    • Thomson, R.E.1    Moreland, J.2
  • 19
    • 1542396457 scopus 로고
    • Scanning interferometric apertureless microscopy: Optical imaging at 10 Angstrom resolution
    • Aug.
    • F. Zenhausern, Y. Martin, and H. K. Wickramasinghe, "Scanning interferometric apertureless microscopy: Optical imaging at 10 Angstrom resolution," Science, vol. 269, pp. 1083-1085, Aug. 1995.
    • (1995) Science , vol.269 , pp. 1083-1085
    • Zenhausern, F.1    Martin, Y.2    Wickramasinghe, H.K.3
  • 21
    • 0001735451 scopus 로고    scopus 로고
    • Solid immersion microscope
    • Dec. 1990.
    • S. M. Mansfield and G. S. Kino, "Solid immersion microscope," Appl. Phys. Lett., vol. 57, no. 24, pp. 2615-2616, Dec. 1990.
    • Appl. Phys. Lett. , vol.57 , Issue.24 , pp. 2615-2616
    • Mansfield, S.M.1    Kino, G.S.2
  • 22
    • 0030574546 scopus 로고    scopus 로고
    • Near-field optical data storage
    • Jan.
    • B. D. Terris, H. J. Mamin, and D. Rugar, "Near-field optical data storage," Appl. Phys. Lett., vol. 68, no. 2, pp. 141-143, Jan. 1996.
    • (1996) Appl. Phys. Lett. , vol.68 , Issue.2 , pp. 141-143
    • Terris, B.D.1    Mamin, H.J.2    Rugar, D.3
  • 23
    • 0037867862 scopus 로고
    • Scanning capacitance microscopy
    • Mar.
    • J. R. Matey and J. Blanc, "Scanning capacitance microscopy," J. Appl. Phys., vol. 57, no. 5, pp. 1437-1444, Mar. 1985.
    • (1985) J. Appl. Phys. , vol.57 , Issue.5 , pp. 1437-1444
    • Matey, J.R.1    Blanc, J.2
  • 24
    • 21544472129 scopus 로고
    • Atomic resolution with an atomic force microscope using piezoresistive detection
    • Feb.
    • M. Tortonese, R. C. Barrett, and C. F. Quate, "Atomic resolution with an atomic force microscope using piezoresistive detection," Appl. Phys. Lett., vol. 62, no. 8, pp. 834-836, Feb. 1993.
    • (1993) Appl. Phys. Lett. , vol.62 , Issue.8 , pp. 834-836
    • Tortonese, M.1    Barrett, R.C.2    Quate, C.F.3
  • 25
    • 0031344594 scopus 로고    scopus 로고
    • 6 MHz, 2 N/m piezoresistive atomic-force-microscope cantilevers with INCISIVE tips
    • Dec.
    • R. P. Ried, H. J. Mamin, B. D. Terris, L.-S. Fan, and D. Rugar, "6 MHz, 2 N/m piezoresistive atomic-force-microscope cantilevers with INCISIVE tips," IEEE J. Microelectromech. Syst., vol. 6, pp. 294-302, Dec. 1997.
    • (1997) IEEE J. Microelectromech. Syst. , vol.6 , pp. 294-302
    • Ried, R.P.1    Mamin, H.J.2    Terris, B.D.3    Fan, L.-S.4    Rugar, D.5
  • 27
    • 0001520375 scopus 로고    scopus 로고
    • Low-stiffness silicon cantilevers for thermal writing and piezoresistive readback with the atomic force microscope
    • Oct.
    • B. W. Chui, H. J. Mamin,'B. D. Terris, T. D. Stowe, D. Rugar, and T. W. Kenny, "Low-stiffness silicon cantilevers for thermal writing and piezoresistive readback with the atomic force microscope," Appl. Phys. Lett., vol. 69, no. 18, pp. 2767-2769, Oct. 1996.
    • (1996) Appl. Phys. Lett. , vol.69 , Issue.18 , pp. 2767-2769
    • Chui, B.W.1    Mamin, H.J.2    Terris, D.3    Stowe, T.D.4    Rugar, D.5    Kenny, T.W.6
  • 28
    • 6144290977 scopus 로고
    • Thermomechanical writing with an atomic force microscope tip
    • Aug.
    • H. J. Mamin and D. Rugar, "Thermomechanical writing with an atomic force microscope tip," Appl. Phys. Lett., vol. 61, no. 8, pp. 1003-1005, Aug. 1992.
    • (1992) Appl. Phys. Lett. , vol.61 , Issue.8 , pp. 1003-1005
    • Mamin, H.J.1    Rugar, D.2
  • 30
    • 0032023865 scopus 로고    scopus 로고
    • Low-stiffness silicon cantilevers with integrated heaters and piezoresisitve sensors for high-density AFM thermomechanical data storage
    • Mar.
    • B. W. Chui,' T. D. Stowe, Y. S. Ju, K. E. Goodson, T. W. Kenny, H. J. Mamin, B. D. Terris, R. P. Ried, and D. Rugar, "Low-stiffness silicon cantilevers with integrated heaters and piezoresisitve sensors for high-density AFM thermomechanical data storage," IEEE J. Microelechromech. Syst., vol. 7, pp. 69-78, Mar. 1998.
    • (1998) IEEE J. Microelechromech. Syst. , vol.7 , pp. 69-78
    • Chui, B.W.1    Stowe, D.2    Ju, Y.S.3    Goodson, K.E.4    Kenny, T.W.5    Mamin, H.J.6    Terris, B.D.7    Ried, R.P.8    Rugar, D.9
  • 32
    • 0031191030 scopus 로고    scopus 로고
    • Force modulation atomic force microscopy recording for ultrahigh density recording
    • July/Aug.
    • S. Hosaka, H. Koyanagi, A. Kikukavva, M. Miyamoto, K. Nakamura, and K. Etoh, "Force modulation atomic force microscopy recording for ultrahigh density recording," J. Vac. Sci. Technol. B, vol. 15, no. 4, pp. 788-792, July/Aug. 1997.
    • (1997) J. Vac. Sci. Technol. B , vol.15 , Issue.4 , pp. 788-792
    • Hosaka, S.1    Koyanagi, H.2    Kikukavva, A.3    Miyamoto, M.4    Nakamura, K.5    Etoh, K.6
  • 34
    • 0030570065 scopus 로고    scopus 로고
    • Imprint lithography with 25-nanometer resolution
    • Apr.
    • S. Y. Chou, P. R. Krauss, and P. J. Renstrom, "Imprint lithography with 25-nanometer resolution," Science, vol. 272, pp. 85-87, Apr. 1996.
    • (1996) Science , vol.272 , pp. 85-87
    • Chou, S.Y.1    Krauss, P.R.2    Renstrom, P.J.3
  • 37
    • 0000669442 scopus 로고    scopus 로고
    • 2 storage density fabricated using nanoimprint lithography and read with proximal probe
    • Nov.
    • 2 storage density fabricated using nanoimprint lithography and read with proximal probe," Appl. Phys. Lett., vol. 71, no. 21, pp. 3174-3176, Nov. 1997.
    • (1997) Appl. Phys. Lett. , vol.71 , Issue.21 , pp. 3174-3176
    • Krauss, P.R.1    Chou, S.Y.2
  • 38
    • 0012986514 scopus 로고    scopus 로고
    • Atomic force microscope based data storage: Track servo and wear study
    • B. D. Terris, S. A. Rishton, H. J. Mamin, R. P. Ried, and D. Rugar, "Atomic force microscope based data storage: Track servo and wear study," Appl. Phys. A, vol. 66, pt. II, pp. S809-S813, 1998.
    • (1998) Appl. Phys. a , vol.66 , Issue.2 PT
    • Terris, B.D.1    Rishton, S.A.2    Mamin, H.J.3    Ried, R.P.4    Rugar, D.5
  • 40
    • 0000734413 scopus 로고    scopus 로고
    • Independent detection of vertical and lateral forces with a sidewall-implanted dual-axis piezoresistive cantilever
    • Mar.
    • B. W. Chui, T. W. Kenny, H. J. Mamin, B. D. Terris, and D. Rugar, "Independent detection of vertical and lateral forces with a sidewall-implanted dual-axis piezoresistive cantilever," Appl. Phys. Lett., vol. 72, no. 11, pp. 1388-1390, Mar. 1998.
    • (1998) Appl. Phys. Lett. , vol.72 , Issue.11 , pp. 1388-1390
    • Chui, B.W.1    Kenny, T.W.2    Mamin, H.J.3    Terris, B.D.4    Rugar, D.5
  • 41
    • 0032046868 scopus 로고    scopus 로고
    • Narrow pitch tracking for AFM recording using optical head
    • Apr.
    • K. Nakamura, H. Koyanagi, and S. Hosaka, "Narrow pitch tracking for AFM recording using optical head," Jpn. J. Appl. Phys. 1, vol. 37, no. 4B, pp. 2271-2273, Apr. 1998.
    • (1998) Jpn. J. Appl. Phys. 1 , vol.37 , Issue.4 B , pp. 2271-2273
    • Nakamura, K.1    Koyanagi, H.2    Hosaka, S.3
  • 44
    • 0040364213 scopus 로고    scopus 로고
    • Microprobes promise a new memory option
    • Jan. 12
    • Nanochip, Inc., Hayward, CA, as described in C. Brown, "Microprobes promise a new memory option," EE Times, pp. 6-7, Jan. 12, 1998.
    • (1998) EE Times , pp. 6-7
    • Brown, C.1
  • 45
    • 0031246660 scopus 로고    scopus 로고
    • Scanning probes as a lithography tool for nanostructures
    • Oct.
    • C. F. Quate, "Scanning probes as a lithography tool for nanostructures," Surf. Sci., vol. 386, no. 1, pp. 259-264, Oct. 1997.
    • (1997) Surf. Sci. , vol.386 , Issue.1 , pp. 259-264
    • Quate, C.F.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.