Microfabricated ultrasensitive piezoresistive cantilevers for torque magnetometry

Sensors and Actuators, A: Physical

Volumn 73, Issue 3, 1999, Pages 235-242

  Brugger, J ^a   Despont, M ^a   Rossel, C ^a   Rothuizen, H ^a   Vettiger, P ^a   Willemin, M ^a,b  

^a IBM RESEARCH ZURICH   (Switzerland)

^b PHYSIK INSTITUT DER UNIVERSITÄT ZÜRICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETIC FIELDS; MAGNETOMETERS; PIEZOELECTRIC DEVICES; SILICON ON INSULATOR TECHNOLOGY; TORQUE;

PIEZORESISTIVE CANTILEVERS;

MICROSENSORS;

EID: 0032636832     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00240-4     Document Type: Article

References (13)

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