Comparison of thermal and piezoresistive sensing approaches for atomic force microscopy topography measurements

Applied Physics Letters

Volumn 85, Issue 11, 2004, Pages 2086-2088

  King, William P ^a   Kenny, Thomas W ^b   Goodson, Kenneth E ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SCANNING THERMAL MICROSCOPY; SOLID STATE MODELS; TEMPERATURE COEFFICIENTS; VOLTAGE SENSITIVITY;

ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; ELECTRIC CONDUCTANCE; ELECTRIC IMPEDANCE; HEATING; MATHEMATICAL MODELS; OPTIMIZATION; PIEZOELECTRIC DEVICES; PROFILOMETRY; RESISTORS; SPURIOUS SIGNAL NOISE; SURFACE TOPOGRAPHY; THERMAL CONDUCTIVITY; THERMOCOUPLES;

SENSORS;

EID: 5444238361     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1787160     Document Type: Article

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