Atomic force microscopy for high speed imaging using cantilevers with an integrated actuator and sensor

Applied Physics Letters

Volumn 68, Issue 6, 1996, Pages 871-873

  Manalis, S R ^a   Minne, S C ^a   Quate, C F ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001520371     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116528     Document Type: Article

References (12)

1. S. C. Minne, Ph. Flueckinger, H. T. Soh, and C. F. Quate, J. Vac. Sci. Technol. B 13, 1380 (1995).
2. S. C. Minne, H. T. Soh, Ph. Flueckinger, and C. F. Quate, Appl. Phys. Lett. 66, 703 (1995).
3. H. J. Mamin and D. Rugar, Appl. Phys. Lett. 61, 1003 (1992).
4. R. C. Barrett and C. F. Quate, J. Vac. Sci. Technol. B 9, 302 (1991).
5. H. J. Mamin, H. Birk, P. Wimmer, and D. Rugar, J. Appl. Phys. 75, 161 (1994).
6. S. C. Minne, S. R. Manalis, and C. F. Quate, Appl. Phys. Lett. 67, 3918 (1995).
7. S. Akamine, T. R. Albrecht, M. J. Zdeblick, and C. F. Quate, IEEE Electron Device Lett. 10, 490 (1989).
8. T. Itoh and T. Suga, in The Proceedings of Transducers '95, Stockholm (Royal Swedish Academy of Engineering Science, 1995), Vol. IVA, p. 632.
9. T. Fujii, S. Watanabe, M. Suzuki, and T. Fujiu, J. Vac. Sci. Technol. B 13, 1119 (1995).
10. M. Tortonese, H. Yamada, R. C. Barrett, and C. F. Quate, in The Proceedings of Transducers '91 (IEEE, New York, 1991), IEEE Publication No. 91CH2817-5, p. 448.
11. EG&G 5302, Princeton Applied Research, Princeton, NJ 08543.
12. Arlunya TF5000, Dindima Group, Victoria 3133, Australia.