Piezoresistive cantilevers in a commercial CMOS technology for intermolecular force detection

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1302-1305

  Villanueva, Guillermo ^a   Pérez Murano, Francesc ^a   Zimmermann, Martin ^b   Lichtenberg, Jan ^b   Bausells, Joan ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b ETH ZURICH   (Switzerland)

Author keywords

CMOS cantilever; Force detection; Piezoresistive cantilever

Indexed keywords

ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; MOLECULAR DYNAMICS; PIEZOELECTRIC DEVICES; POLYCRYSTALLINE MATERIALS; SIGNAL PROCESSING;

CMOS CANTILEVER; FORCE DETECTION; PIEZORESISTIVE CANTILEVER;

CMOS INTEGRATED CIRCUITS;

EID: 33646022872     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.223     Document Type: Article

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