Shear sensitive silicon piezoresistive tactile sensor prototype

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3514, Issue , 1998, Pages 359-367

  Wang, Lin ^a   Beebe, David J ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; ELECTRIC RESISTANCE MEASUREMENT; MICROELECTROMECHANICAL DEVICES; PRESSURE TRANSDUCERS; RESISTORS; SILICON SENSORS;

SHEAR SENSITIVE TACTILE SENSOR;

PIEZOELECTRIC TRANSDUCERS;

EID: 0032304038     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)