Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storage

Journal of Microelectromechanical Systems

Volumn 7, Issue 1, 1998, Pages 69-77

  Chui, Benjamin W ^a,b   Stowe, Timothy D ^b   Ju, Yongho Sungtaek ^b   Goodson, Kenneth E ^b   Kenny, Thomas W ^b   Mamin, H Jonathon ^c   Terris, Bruce D ^c   Ried, Robert P ^a,c   Rugar, Daniel ^a,c  

^a IEEE   (United States)

^b STANFORD UNIVERSITY   (United States)

^c IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DATA RECORDING; DIGITAL STORAGE; MATHEMATICAL MODELS; PIEZOELECTRIC DEVICES; SILICON SENSORS; TEMPERATURE MEASUREMENT;

INTEGRATED HEATERS; PIEZORESISTIVE SENSORS; SILICON CANTILEVERS; THERMOMECHANICAL DATA STORAGE;

MICROELECTROMECHANICAL DEVICES;

EID: 0032023865     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.661386     Document Type: Article

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