Environmental sensors based on micromachined cantilevers with integrated read-out

Ultramicroscopy

Volumn 82, Issue 1-4, 2000, Pages 11-16

  Boisen, A ^a   Thaysen, J ^a   Jensenius, H ^a   Hansen, O ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Alcohol sensor in water; Atomic force microscopy; Cantilever based sensor; Humidity sensor; Integrated read out; Piezoresistive; Probe; Symmetrical Wheatstone bridge; Thermal sensor

Indexed keywords

ALCOHOLS; ATMOSPHERIC HUMIDITY; ATOMIC FORCE MICROSCOPY; PROBES; READOUT SYSTEMS; TEMPERATURE MEASUREMENT; WATER;

ENVIRONMENTAL SENSORS; INTEGRATED PIEZORESISTIVE READOUT; THERMAL SENSORS;

MICROSENSORS;

ALCOHOL;

ARTICLE; BIOSENSOR; ENVIRONMENTAL MONITORING; HUMIDITY; RELIABILITY; TEMPERATURE MEASUREMENT; VALIDATION PROCESS; WATER ANALYSIS;

EID: 0033977788     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(99)00148-5     Document Type: Article

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