Sources of excess noise in silicon piezoresistive microphones

Journal of the Acoustical Society of America

Volumn 119, Issue 5, 2006, Pages 2710-2720

  Dieme, Robert ^a   Bosman, Gijs ^a   Nishida, Toshikazu ^a   Sheplak, Mark ^a  

^a University of Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC VARIABLES CONTROL; ELECTRIC PROPERTIES; MICROELECTROMECHANICAL DEVICES; MICROPHONES; SILICON; VOLTAGE MEASUREMENT;

BLOCKED MEMBRANES; LUMPED NOISES; NOISE SOURCES; PIEZORESISTIVE MICROPHONES;

ACOUSTIC NOISE;

SILICON;

ARTICLE; CALCULATION; ELECTRIC CONDUCTIVITY; ELECTRIC CURRENT; ELECTRIC POTENTIAL; FREQUENCY MODULATION; LOW FREQUENCY NOISE; MATHEMATICAL ANALYSIS; MECHANICS; MICROELECTROMECHANICAL SYSTEM; MICROPHONE; NOISE; PIEZOELECTRICITY; POWER SPECTRUM; PRIORITY JOURNAL; SEMICONDUCTOR; TEMPERATURE; THERMODYNAMICS;

EID: 33646452603     PISSN: 00014966     EISSN: None     Source Type: Journal    
DOI: 10.1121/1.2188367     Document Type: Article

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