Single-chip mechatronic microsystem for surface imaging and force response studies

Proceedings of the National Academy of Sciences of the United States of America

Volumn 101, Issue 49, 2004, Pages 17011-17015

  Hafizovic, Sadik ^a   Barrettino, Diego ^a,b   Volden, Tormod ^a   Sedivy, Jan ^a   Kirstein, Kay Uwe ^a   Brand, Oliver ^a,c   Hierlemann, Andreas ^a  

^a ETH ZURICH   (Switzerland)

^b University of Washington ^*  (United States)

^c GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Atomic force microscopy; Cantilever; Complementary metal oxide semiconductor

Indexed keywords

METAL OXIDE;

ARTICLE; ATOMIC FORCE MICROSCOPY; COST; DIGITAL COMPUTER; FORCE; IMAGING; PRIORITY JOURNAL; SEMICONDUCTOR; SIGNAL PROCESSING;

EID: 10344232029     PISSN: 00278424     EISSN: None     Source Type: Journal    
DOI: 10.1073/pnas.0405725101     Document Type: Article

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