Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications

Nature Nanotechnology

Volumn 2, Issue 2, 2007, Pages 114-120

  Li, Mo ^a   Tang, H X ^a,b   Roukes, M L ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b YALE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; NANOSTRUCTURED MATERIALS; THERMOMECHANICAL TREATMENT; TRANSDUCERS;

CANTILEVER BASED SENSORS; CANTILEVER VIBRATIONS; DISPLACEMENT TRANSDUCER; INTEGRATED ELECTRONICS; MECHANICAL RESONANCE; NANOSCALE MECHANICAL SENSOR; OPTICAL TRANSDUCTION; THERMOMECHANICAL NOISE;

NANOCANTILEVERS;

EID: 33846876588     PISSN: 17483387     EISSN: 17483395     Source Type: Journal    
DOI: 10.1038/nnano.2006.208     Document Type: Article

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