A piezoresistive accelerometer with a novel vertical beam structure

Sensors and Actuators, A: Physical

Volumn 63, Issue 1, 1997, Pages 19-25

  Chen, Hong ^a   Bao, Minhang ^a   Zhu, Haijun ^a   Shen, Shaoqun ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

Accelerometers; Lateral acceleration; Micromachining

Indexed keywords

ANISOTROPY; ASPECT RATIO; ETCHING; MICROMACHINING; SILICON WAFERS;

PIEZORESISTIVE ACCELEROMETERS;

ACCELEROMETERS;

EID: 0031233762     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80424-4     Document Type: Article

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