Noise and frequency analyses of a miniaturized 3-DOF accelerometer utilizing silicon nanowire piezoresistors

Proceedings of IEEE Sensors

Volumn 3, Issue , 2004, Pages 1464-1467

  Dao, Dzung Viet ^a   Toriyama, Toshiyuki ^b   Sugiyama, Susumu ^b  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Accelerometer; Piezoresistive; Si nanowire

Indexed keywords

ACOUSTIC NOISE; ASPECT RATIO; NANOSTRUCTURED MATERIALS; NATURAL FREQUENCIES; RESISTORS; SENSITIVITY ANALYSIS; SILICON;

PIEZORESISTIVE; SI NANOWIRES; SILICON NANOWIRE PIEZORESISTORS;

ACCELEROMETERS;

EID: 27944503586     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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