Optimised cantilever biosensor with piezoresistive read-out

Ultramicroscopy

Volumn 97, Issue 1-4, 2003, Pages 371-376

  Rasmussen, P A ^a   Thaysen, J ^b   Hansen, O ^a   Eriksen, S C ^a   Boisen, A ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b Cantion AS   (Denmark)

Author keywords

Cantilever; Piezoresistive read out; Silicide; Surface stress

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRIC WIRING; READOUT SYSTEMS; SILICON NITRIDE; STRESS ANALYSIS;

PIEZORESISTIVE READ-OUT;

BIOSENSORS;

SILICON NITRIDE; TITANIUM;

ARTICLE; BIOSENSOR; ENCAPSULATION; HIGH TEMPERATURE PROCEDURES; HYPOBARISM; LIQUID; MATERIAL COATING; MEASUREMENT; PIEZOELECTRICITY; SURFACE PROPERTY; VAPOR;

EID: 0037865576     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(03)00063-9     Document Type: Article

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