Low 1f noise, full bridge, microcantilever with longitudinal and transverse piezoresistors

Applied Physics Letters

Volumn 92, Issue 3, 2008, Pages

  Mallon Jr , J R ^a   Rastegar, A J ^a   Barlian, A A ^a   Meyer, M T ^a   Fung, T H ^a   Pruitt, B L ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOSENSORS; FREQUENCY BANDS; RESISTORS; SPECTRAL DENSITY;

FORCE RESOLUTION; PIEZORESISTIVE CANTILEVERS; TRANSVERSE PIEZORESISTORS;

PIEZOELECTRIC DEVICES;

EID: 38549095107     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2825466     Document Type: Article

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