Measurement system for low force and small displacement contacts

Journal of Microelectromechanical Systems

Volumn 13, Issue 2, 2004, Pages 220-229

  Pruitt, Beth L ^a   Park, Woo Tae ^a   Kenny, Thomas W ^a  

^a Stanford University   (United States)

Author keywords

Displacement measurement; Force measurement; Microelectrodes; Microelectromechanical devices; Piezoresistance; Piezoresistive devices

Indexed keywords

ELECTRIC CONTACTS; ELECTRONICS PACKAGING; FORCE MEASUREMENT; INTEGRATED CIRCUIT MANUFACTURE; INTERFEROMETERS; MICROELECTRODES; MICROELECTROMECHANICAL DEVICES;

DISPLACEMENT MEASUREMENT; PIEZORESISTANCE; PIEZORESISTIVE CANTILEVER;

MICROELECTRONIC PROCESSING;

EID: 1942468582     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.820266     Document Type: Article

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