Micromachined inertial sensors

Proceedings of the IEEE

Volumn 86, Issue 8, 1998, Pages 1640-1658

  Yazdi, Navid ^a   Ayazi, Farrokh ^a   Najafi, Khalil ^a  

^a University of Michigan   (United States)

Author keywords

Accelerometer; Gyroscope; Inertial sensors; Microfabrication technologies; Micromachined sensors; Micromachining; Rate sensor; Silicon sensors

Indexed keywords

ACCELEROMETERS; ELECTRONICS PACKAGING; GYROSCOPES; MICROELECTRONICS; MICROMACHINING; PERFORMANCE; SPECIFICATIONS; SYSTEMS ANALYSIS; TECHNOLOGY;

INERTIAL SENSORS; MICROFABRICATION TECHNOLOGIES;

SILICON SENSORS;

EID: 0032138896     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/5.704269     Document Type: Article

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