Progress toward Système International d'Unités traceable force metrology for nanomechanics

Journal of Materials Research

Volumn 19, Issue 1, 2004, Pages 366-379

  Pratt, Jon R ^a   Smith, Douglas T ^a   Newell, David B ^a   Kramar, John A ^a   Whitenton, Eric ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTROSTATICS; FORCE MEASUREMENT; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; SENSITIVITY ANALYSIS;

ELECTROSTATIC FORCE BALANCE; FORCE SENSITIVITY; NANOMECHANICS; PIEZORESISTIVE MICROCANTILEVER;

NANOSTRUCTURED MATERIALS;

EID: 3242722951     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2004.19.1.366     Document Type: Article

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