Crystalline silicon cantilevers for piezoresistive detection of biomolecular forces

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1120-1123

  Villanueva, G ^a,b   Plaza, J A ^a   Montserrat, J ^a   Perez Murano, F ^a   Bausells, J ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b EPFL   (Switzerland)

Author keywords

Crystalline silicon; Force detection; Piezoresistive cantilever

Indexed keywords

BIOMOLECULES; CRYSTALLOGRAPHY; MOLECULAR INTERACTIONS; SILICON;

CRYSTALLINE SILICON; FORCE DETECTION; PIEZORESISTIVE CANTILEVERS;

CRYSTALLINE MATERIALS;

EID: 44149118405     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.01.082     Document Type: Article

References (14)

1. Lavrik N.V., Sepaniak M.J., and Datskos P.G. Review of Scientific Instruments 75 7 (2004) 2229-2253
2. Fritz J., Baller M.K., Lang H.P., Rothuizen H., Vettiger P., Meyer E., Guntherodt H.J., Gerber C., and Gimzewski J.K. Science 288 5464 (2000) 316-318
3. Gupta A., Akin D., and Bashir R. Applied Physics Letters 84 11 (2004) 1976-1978
4. Rief M., Oesterhelt F., Heymann B., and Gaub H.E. Science 275 5304 (1997) 1295-1297
5. Villanueva G., Montserrat J., Perez-Murano F., Rius G., and Bausells J. Microelectronic Engineering 73-74 (2004) 480-486
6. Villanueva G., Perez-Murano F., Zimmermann M., Lichtenberg J., and Bausells J. Microelectronic Engineering 83 4-9 (2006) 1302-1305
7. French P.J. Sensors and Actuators A-Physical 99 1-2 (2002) 3-12
8. Tortonese M., Barrett R.C., and Quate C.F. Applied Physics Letters 62 8 (1993) 834-836
9. Ried R.P., Mamin J., Terris B.D., Fan L.S., and Rugar D. Journal of Microelectromechanical Systems 6 4 (1997) 294-302
10. Harley J.A., and Kenny T.W. Applied Physics Letters 75 2 (1999) 289-291
11. Kanda Y. Sensors and Actuators A-Physical 28 2 (1991) 83-91
12. Sze S.M. Semiconductor Devices, Physics and Technology. second ed. (2002), Wiley, New York p. 564
13. Wortman J.J., and Evans R.A. Journal of Applied Physics 36 1 (1965) 153
14. Thaysen J., Boisen A., Hansen O., and Bouwstra S. Sensors and Actuators A-Physical 83 1-3 (2000) 47-53