Silicon as a plastic material

Journal of Micromechanics and Microengineering

Volumn 9, Issue 4, 1999, Pages 305-312

  Frühauf, Joachim ^a   Gärtner, Eva ^a   Jänsch, Erhard ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MICROELECTROMECHANICAL DEVICES; MIRRORS; SILICA;

PLASTIC RESHAPING; WET ANISOTROPIC ETCHING;

SILICON WAFERS;

EID: 0043067861     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/4/304     Document Type: Article

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