Dynamics of CMOS-based thermally actuated cantilever arrays for force microscopy

Sensors and Actuators, A: Physical

Volumn 115, Issue 2-3 SPEC. ISS., 2004, Pages 516-522

  Volden, T ^a   Zimmermann, M ^a   Lange, D ^a,b   Brand, O ^a,c   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

^b STANFORD UNIVERSITY   (United States)

^c GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

AFM; Cantilever; CMOS; Force microscopy; Thermal actuation

Indexed keywords

ARRAYS; CMOS INTEGRATED CIRCUITS; CROSSTALK; FABRICATION; FREQUENCY RESPONSE; IMAGE ANALYSIS; MICROMACHINING; MICROPROCESSOR CHIPS; SENSORS;

CONSTANT-FORCE IMAGING; FORCE MICROSCOPY; THERMAL ACTUATION;

ACTUATORS;

EID: 4544267236     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.03.058     Document Type: Conference Paper

References (13)

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