SiC MEMS: Opportunities and challenges for applications in harsh environments

Thin Solid Films

Volumn 355, Issue , 1999, Pages 518-524

  Mehregany, Mehran ^a   Zorman, Christian A ^a  

^a Case Western Reserve University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; SILICON CARBIDE;

HARSH ENVIRONMENTS;

THIN FILMS;

EID: 0033361372     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00374-6     Document Type: Article

References (32)

1. Harris G.L. Properties of Silicon Carbide. 1995.
2. Kovacs G.T.A. Micromachined Transducers. 1998;McGraw Hill, New York.
3. Woodell T.r. Electrochem. Soc. 68:1936;111.
4. Fisher G.R., Barnes P. Philos. Mag. B. 61:1990;217.
5. Nishino S., Powell J.A., Will H.A. Appl. Phys. Lett. 42:1983;460.
6. Nishino S., Saraie J. Rahman M.M., Yang C.Y., Harris G.L. Amorphous and Crystalline Silicon Carbide II. 1989;8.
7. Chiu C.C., Desu S.B., Chen G., Tsai C.Y., Reynolds W.T. Jr. J. Mater. Res. 10:1995;1099.
8. Golecki I., Reidinger F., Marti J. Mat. Res. Soc. Symp. Proc. 242:1992;519.
9. Hagiwara C., Itoh K.M., Muto J., Nagasawa H., Yagi K., Harima H., Mizoguchi K., Nakashima S. Proceedings of the 7th International Conference on Silicon Carbide, III-nitrides and Related Materials. Vol. 5. 1997;331. August 31-September.
10. Powell J.A., Matus L.G., A M. Kuczmarski. J. Electrochem. Soc. 134:1987;1558.
11. Zorman C.A., Fleischman A.J., Dewa A.S., Mehregany M., Jacob C., Nishino S., Pirouz P. J. Appl. Phys. 78:1995;5136.
12. Vinod K., Zorman C.A., Yasseen A.A., Mehregany M. J. Electron Mater. 27:1998;L17.
13. Kamimura K., Koike K., Ono H., Homma T., Onuma Y., Yonekubo S. Rahman M.M., Yang C.Y., Harris G.L. Amorphous and Crystalline Silicon Carbide IV. 1992;259.
14. Kobayashi J., Yonekubo S., Kamimura K., Onuma Y. Silicon Carbide and Related Materials. Nakashima S., Matsunami H., Yoshida S., Harima H. 1995;229 IOP Publishing Ltd, Bristol, UK.
15. Onuma Y., Miyashita S., Nishibe Y., Kamimura K., Tezuka K. Rahman M.M., Yang C.Y., Harris G.L. Amorphous and Crystalline Silicon Carbide II. 1989;212.
16. Nagasawa H., Yamaguchi Y. Thin Solid Films. 225:1993;230.
17. Roy S., Zorman C.A., Wu C.H., Fleischman A.J., Mehregany M. Mat. Res. Soc. Symp. Proc. 444:1997;81.
18. Kamins T. Metal. Trans. of AIME. 2:1971;2292.
19. Adamczewska J., Budzynski T. Thin Solid Films. 113:1984;271.
20. Wei L., Vaudin M., Hwang C.S., White G., Xu J., Steckl A.J. J. Mater. Res. 10:1995;1889.
21. Okojie R.S., Ned A.A., Kurtz A.D. Sensors and Actuators. A66:1998;200.
22. Mehregany M., Tong L., Matus L., Larkin D. IEEE Trans. Electron. Dev. 44:1997;74.
23. Zeirmann R., von Berg J., Reichert W., Obermeier E., Eickhoff M., Krotz G. Wise K., Senturia S. Technical Digest - 1997 International Conference on Solid State Sensors and Actuators. 1997;1411. June 16-19.
24. Singh A., Mehregany M., Phillips S., Harvey R., Benjamin M. Atomization and Sprays. 8:1998;405.
25. Rajan N., Zorman C.A., Mehregany M., DeAnna R., Harvey R. Thin Solid Films. 315:1998;170.
26. Rajan N., Zorman C.A., Mehregany M. Technical Digest - 1998 Solid State Sensor and Actuator Workshop. 1998;31. June 7-11.
27. Fleischman A.J., Roy S., Zorman C.A., Mehregany M. Allen M., Reed M. Proceedings of the 9th Annual International Workshop on Microelectromechanical Systems. 1996;234. Feb 11-15.
28. Fleischman A.J., Wei X., Zorman C.A., Mehregany M. Proceedings of the 7th International Conference on Silicon Carbide. III-nitrides and Related Materials. Vol. 5. 1997;885. August 31 - September.
29. Fleischman A.J., Roy S., Zorman C.A., Mehregany M. Proceedings of the 7th International Conference on Silicon Carbide. III-nitrides and Related Materials. Vol. 5. 1997;889. August 31 - September.
30. Fleischman A.J., Zorman C.A., Mehregany M. J. Vac. Sci. Technol. B16:1998;536.
31. Yasseen A.A., Zorman C.A., Mehregany M. J Microelectromechanical Systems. 1999.
32. Yaseen A.A., Wu C.H., Mehregany M. Gabriel K., Najafi K. Technical Digest 12th Annual International Conference on Microelectromechanical Systems. 1999;644. January 17-21.