MOSFET-embedded microcantilevers for measuring deflection in biomolecular sensors

Science

Volumn 311, Issue 5767, 2006, Pages 1592-1595

  Shekhawat, Gajendra ^a,b   Tark, Soo Hyun ^c   Dravid, Vinayak P ^a,b,c  

^a NORTHWESTERN UNIVERSITY   (United States)

^b NORTHWESTERN UNIVERSITY   (United States)

^c Northwestern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIBODIES; CANTILEVER BEAMS; DEFLECTION (STRUCTURES); MOS DEVICES; SEMICONDUCTOR MATERIALS; SILICON COMPOUNDS;

BIOMOLECULAR SENSORS; BIOTIN; MOSFET; SURFACE STRESSES;

SENSORS;

ANTIBODY; BIOTIN; METAL OXIDE;

SENSOR;

APPARATUS; ARTICLE; BIOSENSOR; IMMOBILIZATION; MEASUREMENT; MECHANICAL PROBE; METAL OXIDE SEMICONDUCTOR FIELD EFFECT TRANSISTOR; MICROCANTILEVER; MOLECULE; NANOTECHNOLOGY; PIEZOELECTRICITY; PRIORITY JOURNAL; SEMICONDUCTOR; STRESS; SURFACE PROPERTY;

BINDING SITES; BIOSENSING TECHNIQUES; BIOTIN; FINITE ELEMENT ANALYSIS; IMMUNOGLOBULIN G; NANOTECHNOLOGY; PROTEIN BINDING; SENSITIVITY AND SPECIFICITY; STREPTAVIDIN; TRANSISTORS;

EID: 33645085279     PISSN: 00368075     EISSN: 10959203     Source Type: Journal    
DOI: 10.1126/science.1122588     Document Type: Article

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26. Supported by NSF Electrical and Communications System grant ECS-0330410 and Defense Advanced Research Projects Agency grant F30602-01-2-OS40. This work made use of the Microfabrication Applications Laboratory at the University of Illinois, Chicago, the Center for Nanophase Materials Science at Oak Ridge National Laboratory, and the NUANCE center facilities at Northwestern University. We thank R. Lajos, H. Zeng, and A. Feinerman for process assistance and support; T. Thundat, D. Ramaya, K. Hansen, and I. Lee for assistance in immobilization of antibodies; and A. Srivastava for assistance in noise measurements.