Silicon angular rate sensor for automotive applications with piezoelectric drive and piezoresistive read-out

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 879-882

  Voss, Ralf ^a   Bauer, Karin ^a   Ficker, Wilhelm ^a   Gleissner, Tanjo ^a   Kupke, Winfried ^a   Rose, Matthias ^a   Sassen, Stefan ^a   Schalk, Josef ^a   Seidel, Helmut ^a   Stenzel, Erwin ^a  

^a DAIMLER AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; MICROMACHINING; OSCILLATIONS; PIEZOELECTRICITY; SHEAR STRESS;

CORIOLIS FORCE; PIEZOELECTRIC DRIVE; PIEZORESISTIVE READ OUT; SILICON ANGULAR RATE SENSOR; WAFER SURFACE;

SILICON SENSORS;

EID: 0030685229     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (25)