Design and characterization of microfabricated piezoresistive floating element-based shear stress sensors

Sensors and Actuators, A: Physical

Volumn 134, Issue 1, 2007, Pages 77-87

  Barlian, A Alvin ^a   Park, Sung Jin ^a   Mukundan, Vikram ^a   Pruitt, Beth L ^a  

^a Stanford University   (United States)

Author keywords

Floating element; In plane force; Ion implantation; MEMS; Micromachined; Oblique implant; Out of plane force; Piezoresistive; Piezoresistors; Shear stress sensor; Underwater

Indexed keywords

DOPPLER EFFECT; ION IMPLANTATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SENSITIVITY ANALYSIS; SHEAR STRESS;

FLOATING ELEMENTS; IN-PLANE FORCE; OBLIQUE-IMPLANT; OUT-OF-PLANE FORCE; SHEAR STRESS SENSORS;

PIEZOELECTRIC DEVICES;

EID: 33847301594     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.04.035     Document Type: Article

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