Advanced temperature compensation for piezoresistive sensors based on crystallographic orientation

Review of Scientific Instruments

Volumn 78, Issue 4, 2007, Pages

  Chui, B W ^a   Aeschimann, L ^a   Akiyama, T ^a   Staufer, U ^a   De Rooij, N F ^a   Lee, J ^b   Goericke, F ^b   King, W P ^c   Vettiger, P ^d  

^a Swiss Center for Electronics   (Switzerland)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^c UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^d CSEM   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; CRYSTALLOGRAPHY; OPTIMIZATION; RESISTORS; SENSORS; SILICON; STRAIN;

CRYSTALLINE AXIS; PIEZORESISTIVE SENSORS; TEMPERATURE COMPENSATION; THERMAL EQUILIBRATION; UNCOUPLED RESISTORS;

PIEZOELECTRIC DEVICES;

ARTICLE; CRYSTALLOGRAPHY; IMPEDANCE;

CRYSTALLOGRAPHY; ELECTRIC IMPEDANCE;

EID: 34247579809     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2722386     Document Type: Article

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