Simulation, fabrication and testing of bulk micromachined 6h-SiC high-g piezoresistive accelerometers

Sensors and Actuators, A: Physical

Volumn 104, Issue 1, 2003, Pages 11-18

  Atwell, Andrew R ^a,e   Okojie, Robert S ^a   Kornegay, Kevin T ^b   Roberson, Scott L ^c   Beliveau, Alain ^d  

^a NASA GLENN RESEARCH CENTER   (United States)

^b Department of Obstetrics Gynecology   (United States)

^c AIR FORCE RESEARCH LABORATORY   (United States)

^d APPLIED RESEARCH ASSOCIATES   (United States)

^e INSTITUTE FOR DEFENSE ANALYSES   (United States)

Author keywords

Accelerometer; MEMS; Piezoresistivity; Shock testing; Silicon carbide

Indexed keywords

ACCELEROMETERS; BENCHMARKING; COMPUTER SIMULATION; IMPACT TESTING; MICROELECTROMECHANICAL DEVICES; SENSITIVITY ANALYSIS; SHOCK TESTING; SILICON CARBIDE; SINGLE CRYSTALS;

PIEZORESISTIVITY;

MICROMACHINING;

EID: 0037445348     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00436-3     Document Type: Article

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