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Volumn , Issue , 2004, Pages 119-120
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An integrated MEMS system for in-situ mechanical testing of nanostructures
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Author keywords
[No Author keywords available]
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Indexed keywords
ASPECT RATIO;
CARBON NANOTUBES;
ELECTROMECHANICAL DEVICES;
REACTIVE ION ETCHING;
SCANNING ELECTRON MICROSCOPY;
STRESS ANALYSIS;
TRANSMISSION ELECTRON MICROSCOPY;
COMPRESSIVE LOADING;
NANOSTRUCTURE TESTING;
NANOSTRUCTURES;
STRUCTURAL STABILITY;
NANOSTRUCTURED MATERIALS;
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EID: 21244455232
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1115/nano2004-46067 Document Type: Conference Paper |
Times cited : (8)
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References (3)
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