메뉴 건너뛰기




Volumn , Issue , 2004, Pages 119-120

An integrated MEMS system for in-situ mechanical testing of nanostructures

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CARBON NANOTUBES; ELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; STRESS ANALYSIS; TRANSMISSION ELECTRON MICROSCOPY;

EID: 21244455232     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/nano2004-46067     Document Type: Conference Paper
Times cited : (8)

References (3)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.