A Monolithic Surface Micromachined Accelerometer with Digital Output

IEEE Journal of Solid-State Circuits

Volumn 30, Issue 12, 1995, Pages 1367-1373

  Boser, Bernhard E ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Silicon Systems Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIPOLAR INTEGRATED CIRCUITS; CMOS INTEGRATED CIRCUITS; FEEDBACK; INTEGRATED CIRCUIT MANUFACTURE; MONOLITHIC INTEGRATED CIRCUITS; PERFORMANCE; ROBUSTNESS (CONTROL SYSTEMS); SENSITIVITY ANALYSIS; SENSORS; THIN FILMS;

DIGITAL OUTPUT; ELECTRONIC CIRCUITRY; ONCHIP ELECTRONICS; SURFACE MICROMACHINED ACCELEROMETER;

ACCELEROMETERS;

EID: 0029510572     PISSN: 00189200     EISSN: 1558173X     Source Type: Journal    
DOI: 10.1109/4.482163     Document Type: Article

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