Recent developments in dimensional nanometrology using AFMs

Measurement Science and Technology

Volumn 22, Issue 12, 2011, Pages

  Yacoot, Andrew ^a   Koenders, Ludger ^b  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

^b PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

AFM cantilever; metrological AFM; nanometrology

Indexed keywords

UNITS OF MEASUREMENT;

AFM CANTILEVERS; DIMENSIONAL NANOMETROLOGY; NANOMETROLOGY; NATIONAL MEASUREMENT INSTITUTE; QUANTITATIVE MEASUREMENT; SCANNING PROBES; TRACEABLE METROLOGY; WORK IN PROGRESS;

ATOMIC FORCE MICROSCOPY;

EID: 81555216176     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/22/12/122001     Document Type: Review

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