Investigations and calculations into decreasing the uncertainty of a nanopositioning and nanomeasuring machine (NPM-Machine)

Measurement Science and Technology

Volumn 18, Issue 2, 2007, Pages 482-486

  Schmidt, I ^a   Hausotte, T ^a   Gerhardt, U ^a   Manske, E ^a   Jager G ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Angle sensor; Laser interferometer; Nanopositioning and nanomeasuring machine; Weight force compensation

Indexed keywords

COMPUTATION THEORY; LASER INTERFEROMETRY; LINEAR SYSTEMS; NATURAL FREQUENCIES; SENSORS;

ANGLE SENSOR; LASER INTERFEROMETERS; NANOMEASURING MACHINE; NANOPOSITIONING; WEIGHT FORCE COMPENSATION;

POSITION CONTROL;

COMPUTATION THEORY; LASER INTERFEROMETRY; LINEAR SYSTEMS; NATURAL FREQUENCIES; POSITION CONTROL; SENSORS;

EID: 34247215681     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/2/S22     Document Type: Conference Paper

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