Algorithms for scanned probe microscope image simulation, surface reconstruction, and tip estimation

Journal of Research of the National Institute of Standards and Technology

Volumn 102, Issue 4, 1997, Pages 425-454

  Villarrubia, J S ^a,b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b NIST Mfg Engineering Laboratory   (United States)

Author keywords

Algorithms; Atomic force microscopy; Blind reconstruction; Dimensional metrology; Image simulation; Mathematical morphology; Scanned probe microscopy; Scanning tunneling microscopy; Surface reconstruction; Tip artifacts; Tip estimation

Indexed keywords

EID: 8744234038     PISSN: 1044677X     EISSN: None     Source Type: Journal    
DOI: 10.6028/jres.102.030     Document Type: Article

References (42)

1. C. C. Wong, H. I. Smith, and C. V. Thompson, Appl. Phys. Lett. 48, 335 (1986).
2. L. A. Files-Sesler, T. Hogan, and T. Taguchi, J. Vac. Sci. Technol. A 10, 2875 (1992).
3. J. Vesenka, M. Guthold, C. L. Tang, D. Keller, E. Delaine, and C. Bustamante, Ultramicroscopy 42-44, 1243 (1992).
4. The National Technology Roadmap for Semiconductors, (Semiconductor Industry Association, San Jose, CA, 1994).
5. E. C. Teague, L. W. Linholm, M. W. Cresswell, W. B. Penzes, J. A. Kramar, F. E. Scire, J. S. Villarrubia, and J. S. Jun, in: Proc. 1993 IEEE Int. Conf. on Microelectronic Test Structures; Sitges, Barcelona, Spain, March 22-25, 1993, p. 213.
6. J. Schneir, T. H. McWaid, J. Alexander, and B. P. Wilfley, J. Vac. Sci. Technol. B 12, 3561 (1994).
7. G. Reiss, F. Schneider, J. Vancea, and H. Hoffmann, Appl. Phys. Lett. 57, 867 (1990).
8. D. Keller, Surf. Sci. 253, 353 (1991).
9. J. Vesenka, R. Miller, and E. Henderson, Rev. Sci. Instrum. 65, 2249 (1994).
10. S. Xu and M. F. Arnsdorf, J. Microsc. 173, 199 (1994).
11. C. Odin, J. P. Aimé, Z. El Kaakour, T. Bouhacina, Surf. Sci. 317, 321 (1994).
12. D. J. Keller and F. S. Franke, Surf. Sci. 294, 409 (1993).
13. H. Gallarda and R. Jain, Proceedings of Conference on Integrated Circuit Metrology, Inspection, and Process Control, V, SPIE Vol. 1464, 459 (1991).
14. G. S. Pingali and R. Jain, Proceedings IEEE Workshop on Applications of Computer Vision (1992) p. 282.
15. N. Bonnet, S. Dongmo, P. Vautrot, and M. Troyon, Microsc. Microanal. Microstruct. 5, 477 (1994).
16. P. Markiewicz and M. C. Goh, Langmuir 10, 5 (1994).
17. D. L. Wilson, K. S. Kump, S. J. Eppell, and R. E. Marchant, Langmuir 11, 265 (1995).
18. J. S. Villamibia, Surf. Sci. 321, 287 (1994).
19. P. M. Williams, K. M. Shakesheff, M. C. Davies, D. E. Jackson, C. J. Roberts, and S. J. B. Tendler, J. Vac. Sci. Technol. B 14, 1557 (1996).
20. S. Dongmo, M. Troyon, P. Vautrot, E. Detain, and N. Bonnet, J. Vac. Sci. Technol. B 14, 1552 (1996).
21. J. S. Villamibia, J. Vac. Sci. Technol. B 14, 1518 (1996).
22. J. Serra, Image Analysis and Mathematical Morphology, New York, Academic (1982).
23. S. R. Sternberg, Computer Vision, Graphics, and Image Processing, 35, 333 (1986).
24. E. R. Dougherty and C. R. Giardina, Chap. 3 in Image Processing Continuous to Discrete, Vol. 1, Prentice Hall (1987).
25. R. M. Haralick, S. R. Sternberg, and X. Zhuang, in IEEE Transactions on Pattern Analysis and Machine Intelligence, Vol. PAMI-9, (1987) p. 532-550.
26. C. R. Giardina and E. R. Dougherty, Morphological Methods in Image and Signal Processing, (Prentice Hall, 1988).
27. J. R. Lowney, M. T. Postek, and A. E. Vladar, in: Proc. Conf. on Integrated Circuit Metrology, Inspection, and Process Control, VIII, SPIE Vol. 2196, 85 (1994); M. T. Postek, J. Res. Natl. Inst. Stand. Technol. 99, 641 (1994).
28. J. R. Lowney, M. T. Postek, and A. E. Vladar, in: Proc. Conf. on Integrated Circuit Metrology, Inspection, and Process Control, VIII, SPIE Vol. 2196, 85 (1994); M. T. Postek, J. Res. Natl. Inst. Stand. Technol. 99, 641 (1994).
29. D. Nyyssonen and R. D. Larrabee, J. Res. Nat. Bur. Stand. (U.S.) 92, 187 (1987).
30. R. Revay, J. Schneir, D. Brower, J. Villarrubia, J. Fu, J. Cline, T. J. Hsieh, and W. Wong-Ng, Mat. Res. Soc. Symp. Proc. 343, 119 (1994).
31. J. E. Griffith and D. A. Grigg, J. Appl. Phys. 74, R83 (1993).
32. R. C. Barrett and C. F. Quate, Rev. Sci. Instrum. 62, 1393 (1991).
33. Q. Zhong, D. Inniss, K. Kjoller, and V. B. Elings, Surf. Sci. Lett. 290, L688 (1993); V. Elings and J. Gurley, U.S. Patent No. 5,266,801 (1993).
34. Q. Zhong, D. Inniss, K. Kjoller, and V. B. Elings, Surf. Sci. Lett. 290, L688 (1993); V. Elings and J. Gurley, U.S. Patent No. 5,266,801 (1993).
35. J. E. Griffith, H. M. Marchman, G. L. Miller, and L. C. Hopkins, J. Vac. Sci. Technol. B 13, 1100 (1995); G. L. Miller, J. E. Griffith, E. R. Wagner and D. A. Grigg, Rev. Sci. Instrum. 62, 705 (1991).
36. J. E. Griffith, H. M. Marchman, G. L. Miller, and L. C. Hopkins, J. Vac. Sci. Technol. B 13, 1100 (1995); G. L. Miller, J. E. Griffith, E. R. Wagner and D. A. Grigg, Rev. Sci. Instrum. 62, 705 (1991).
37. J. P. P. Starink and T. M. Jovin, Surf. Sci. 359, 291 (1996).
38. J. C. Russ, Computer-Assisted Microscopy: The Measurement and Analysis of Images, Plenum, New York (1990).
39. P. M. Williams, M. C. Davies, D. E. Jackson, C. J. Roberts, and S. J. B. Tendler, J. Vac. Sci. Technol. B 12, 1456 (1994).
40. D. A. Grigg, P. E. Russell, J. E. Griffith, J. J. Vasile, and E. A. Fitzgerald, Ultramicroscopy 42-44, 1616 (1992).
41. K. M. Edenfeld, K. F. Jarausch, T. J. Stark, D. P. Griffis, and P. E. Russell, J. Vac. Sci. Technol. B 12, 3571 (1994).
42. J. Vesenka, S. Manne, R. Giberson, T. Marsh, and E. Henderson, Biophys. J. 65, 992 (1992).