An atomic force microscope head designed for nanometrology

Measurement Science and Technology

Volumn 18, Issue 6, 2007, Pages 1735-1739

  Lu, Mingzhen ^a   Gao, Sitian ^b   Jin, Qihai ^b   Cui, Jianjun ^b   Du, Hua ^b   Gao, Hongtang ^a  

^a TSINGHUA UNIVERSITY   (China)

^b NATIONAL INSTITUTE OF METROLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTATION THEORY; ERROR ANALYSIS; LIGHT POLARIZATION; MIRRORS; SEMICONDUCTOR LASERS;

ABBE ERROR; FORCE-DISTANCE CURVE;

OPTICAL VARIABLES MEASUREMENT;

ATOMIC FORCE MICROSCOPY; COMPUTATION THEORY; ERROR ANALYSIS; LIGHT POLARIZATION; MIRRORS; OPTICAL VARIABLES MEASUREMENT; SEMICONDUCTOR LASERS;

EID: 34248208500     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/6/S11     Document Type: Article

References (8)

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