MEMS-based fast scanning probe microscopes

Ultramicroscopy

Volumn 110, Issue 6, 2010, Pages 599-604

  Tabak, F C ^a   Disseldorp, E C M ^a   Wortel, G H ^a   Katan, A J ^b   Hesselberth, M B S ^a   Oosterkamp, T H ^a   Frenken, J W M ^a   van Spengen, W M ^a,c  

^a LEIDEN UNIVERSITY   (Netherlands)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c Falco Systems   (Netherlands)

Author keywords

High speed scanning; MEMS; Scanning probe microscopy

Indexed keywords

AFM; ATOMIC FORCE MICROSCOPES; DYNAMIC SURFACE; FAST SCANNING; FAST SCANNING PROBES; HIGH RESONANCE FREQUENCY; HIGH-SPEED SCANNING; IMAGE DISTORTIONS; IMAGING SPEED; MICROELECTROMECHANICAL SYSTEMS; MICROMETER SIZES; NANO-METER-SCALE; NEW HIGH; PIEZO SCANNERS; SCANNING TUNNELING MICROSCOPES; VERY LOW MASS;

ATOMIC FORCE MICROSCOPY; GRAIN BOUNDARIES; MICROSCOPES; OPTICAL KERR EFFECT; PROBES; RESONANCE; SPEED;

SCANNING;

ARTICLE; ATOMIC FORCE MICROSCOPY; CALCULATION; CATALYSIS; CONTROLLED STUDY; CRYSTAL STRUCTURE; IMAGE ANALYSIS; INTERMETHOD COMPARISON; MICROELECTROMECHANICAL SYSTEM; PARTICLE SIZE; PROCESS OPTIMIZATION; SCANNING PROBE MICROSCOPY; SCANNING TUNNELING MICROSCOPY; SURFACE PROPERTY;

EID: 77953543002     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2010.02.018     Document Type: Article

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